Vacuum plasma cleaning machine
  • Air ProVacuum plasma cleaning machine

Vacuum plasma cleaning machine

Vacuum plasma cleaner: the gas is ionized into plasma state through the excitation power supply. The plasma acts on the product surface to clean the pollutants on the product surface, improve the surface activity and enhance the adhesion performance. Plasma cleaning is a new, environment-friendly, efficient and stable surface treatment method.

Model:SPV-60

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Product Description

Equipment principle:


In the vacuum chamber, high-energy plasma is generated by RF power supply under certain pressure.



Product features:


The product placement fixture is flexible and changeable, which can adapt to irregular products


The horizontal electrode design can meet the processing requirements of soft products.

Low energy and gas consuming products.

Convenient way of retracting and releasing the board

Integrated vacuum system with small floor area

Reasonable plasma reaction space makes the treatment more uniform

The integrated control system design makes the operation more convenient


Configuration list



Item

Name

Description

Unit

Qty

1

Main machine

Machine size:900×1600×900mm(W×H×L)

pcs

1

2

Vacuum Chamber

375×375×430mm(W×H×L)

pcs

1

3

Power

RF power supply

Power supply

set

1

Frequency:13.56MHz;Power:0~600W Automatic vacuum capacitor matching

Frequency:40KHz;0~1000W; 

4

PLC

S7-200

pcs

1

5

Touch screen

MT6071iE

pcs

1

6

Flowmeter

Britain wawick

pcs

2

7

Vacuum pump set

40m3/h

pcs

1

8

Vacuum gauge

INFICON

pcs

1

9

Instructions

SPV-60 USER MANUAL

pcs

1

Product function:

Surface activation

1.Improve the surface energy and realize the effective combination of difficult bonding materials

2.Improve the wettability of glue or other liquids on the product surface

Surface coarsening

1.The plasma bombards the product surface to produce nano micro etching
Tightness: military grade welding, strong tightness and low leakage rate

1.Sustainability: unique patent / imported power supply, strong stability

2.Flexibility: various options are available for each component

3.Diversity: provide a variety of automation solutions according to the needs of the industry

4.Use cost: low energy and gas consumption and low use cost

5.Control software: unique patented software, which can be customized according to customer needs


Industry application:


1.Mobile phone industry: TP, middle frame and back cover surface cleaning and activation

2.PCB / FPC Industry: drilling dirt and surface cleaning in the hole, coarsening and cleaning of coverlay surface

3.Semiconductor industry: semiconductor packaging, camera module, LED packaging, BGA packaging, wire bond pretreatment

4.Ceramics: pre-treatment of packaging and dispensing

5.Surface roughening etching: Pi surface roughening, PPS etching, semiconductor wafer PN junction removal, ITO film etching

6.Plastic materials: Teflon Teflon surface activation, ABS surface activation, and cleaning activation of other plastic materials

7.Surface cleaning before ITO coating


Vacuum plasma cleaning machineproduct series:




Specification:

Model

SPV-60

SPV-100

SPV-150

SPV-200

Machine size: (L*W*H)mm

900*1600*900

900*1750*1000

1020*1720*1120

1350*1700*1200

Power

Radio frequency:0-1000W;Intermediate frequency:0-2000W

Frequency

Radio frequency:13.56MHz;Intermediate frequency:40KHz

PCB size

345*344mm

420*411mm

587*470mm

575*510mm

Spacing

22.5mm

34mm

Pump set

Two stage vane pump:40m³/h

Two stage vane pump:60m³/h

Two stage / roots pump + single stage

Roots pump + single stage

Process gas

Customizable (argon, oxygen, nitrogen, hydrogen, carbon tetrafluoride)



Major Atmospheric plasma equipment solutions:


Standard type SPV-100

Mainly used in PCB industry SPV-2000 

Online vacuum plasma cleaning machine

Online flake vacuum plasma cleaning machine 

Mainly used in semiconductor industry)





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